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Refurbished gasonics aura 1000 for plasma asher in San Jose



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Refurbished Gasonics Aura 1000

Manufacture:Gasonics

Refurbished by:Allwin21 Corp

Gasonics is a Registered Trademark of Novellus Corp.GaSonic Aura 1000 Plasma System is the microprocessor controlled down-stream, or “ afterglow” photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. The unit is fully automated, cassette-to-cassette, and is a single-wafer process design.




Single-wafer process
3”, 4”, 5” and 6” wafer capability
Automatic Equip robot wafer loader / unloader
Infrared heat source for process temperature control
Downstream processing: No wafer radiation damage(
Ad Details
allwin21
San Jose
11-09-2009
408-988-5188

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Refurbished Gasonics Aura 1000 for plasma asher

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